气体 |
测量范围 |
酸性化合物(Acid Compounds) |
0 to 3 / 10 ppm |
氨气/Amonia (NH3) |
0 to 100 / 300 / 1000 ppm |
三氯化硼/Boron Trichloride (BCl3) |
0 to 10 ppm |
一氧化碳/Carbon Monoxide (CO) |
0 to 100 / 300 / 1000 ppm |
氯气 / Chlorine (Cl2) |
0 to 1 / 10 / 25 ppm |
乙硼烷/Diborane (B2H6) |
0 to 0.5 ppm |
氰化物/Hydride (PH3) |
0 to 0.3 / 1 / 10 ppm |
氢气/Hydrogen (H2) |
0 to 1000 / 3000 ppm |
硫化氢/Hydrogen Sulfide (H2S) |
0 to 20 / 50 / 100 ppm |
联氨/Hydrazine (N2H4) |
0 to 1 ppm |
二氧化氮/Nitrogen Dioxide (NO2) |
0 to 10 ppm |
一氧化氮/Nitrogen Monoxide (NO) |
0 to 50 ppm |
有机蒸气/Organic Vapours |
0 to 50 / 100 / 200 ppm |
氧气/Oxygen (O2) |
0 to 5 / 25 / 100 Vol% |
臭氧/Ozone (O3) |
0 to 0.5 ppm |
二氧化硫/Sulfur Dioxide (SO2) |
0 to 10 ppm |