|
气体种类 |
量程 |
峰值报警 |
平均阀值报警 |
危险浓度报警 |
|
H2 |
0...1.000 % |
- |
- |
0.01%vol |
|
H2 |
0...4.00 % |
- |
- |
0.05%vol |
|
H2S |
0...100 ppm |
10 ppm |
10 ppm |
2ppm |
|
H2S |
0...30.0 ppm |
10 ppm |
10 ppm |
0.5ppm |
|
Cl2 |
0...5.00 ppm |
0.5 ppm |
0.5 ppm |
0.15ppm |
|
CO |
0...500 ppm |
30 ppm |
25 ppm |
10ppm |
|
O2 |
0...25.0 % |
- |
- |
0.00% |
|
H2Se |
0...1.00 ppm |
0.015 ppm |
0,05 ppm |
0.05ppm |
|
HCN |
0...30.0 ppm |
1.9 ppm |
4.7 ppm# |
1ppm |
|
HCl |
0...30.0 ppm |
2 ppm |
5 ppm# |
1ppm |
|
HCl |
0...30.0 ppm |
2 ppm |
5 ppm# |
1ppm |
|
SO2 |
0...25.0 ppm |
0.5 ppm |
2 ppm |
0.5ppm |
|
AsH3 |
0...1.00 ppm |
- |
0.05 ppm |
0.03ppm |
|
AsH3 |
0...1.00 ppm |
- |
0.05 ppm |
0.03ppm |
|
AsH3 |
0...10.0 ppm |
- |
0.05 ppm |
, , , 0.5ppm |
|
PH3 |
0...1.00 ppm |
0.10 ppm |
0.30 ppm |
0.05ppm |
|
PH3 |
0...1.00 ppm |
0.10 ppm |
0.30 ppm |
0.05ppm |
|
B2H6 |
0...1.00 ppm |
- |
0.10 ppm |
0.05ppm |
|
3MS |
0 ... 20.0 ppm |
- |
- |
1.5ppm |
|
SiH4 |
0...50.0 ppm |
- |
5 ppm |
1.0ppm |
|
F2 |
0...5.00 ppm |
0.10 ppm |
0.10 ppm |
0.03ppm |
|
HF |
0...10,0 ppm |
2 ppm |
3 ppm# |
0.5ppm |
|
COCl2 |
0...1.00 ppm |
0.02 ppm |
0,10 ppm |
0.02ppm |
|
NH3 |
0...50 ppm |
20 ppm |
25 ppm |
1ppm |
|
NH3 |
0...1000 ppm |
20 ppm |
25 ppm |
15ppm |
|
NH3 |
0...100 ppm |
20 ppm |
25 ppm |
5ppm |
|
HMDS |
0...0.500 % |
- |
- |
0.010%vol |
|
HMDS |
0...500 ppm |
- |
- |
5ppm |
|
Br2 |
0...5.00 ppm |
- |
0,1 ppm |
0.05ppm |
|
GeH4 |
0...5.0 ppm |
- |
0,20 ppm |
0.1ppm |
|
HBr |
0...30.0 ppm |
2 ppm |
3 ppm# |
1ppm |
|
O3 |
0...1.00 ppm |
0.10 ppm* |
0,10 ppm |
0.05ppm |
|
NO |
0...250 ppm |
- |
25 ppm |
5ppm |
|
NO2 |
0...25.0 ppm |
5 ppm |
3 ppm |
0.5ppm |
|
ClO2 |
0...1.00 ppm |
0.10 ppm |
0,10 ppm |
0.03ppm |
|
ClF3 |
0...1.00 ppm |
- |
0,10 ppm |
0.03ppm |
|
TEOS |
0...100 ppm |
10 ppm |
10 ppm |
5ppm |
|
TMB |
0...200 ppm |
- |
- |
5ppm |
|
N2H4 |
0...1.00 ppm |
0.10 ppm* |
0,01 ppm |
0.02ppm |
|
TMP |
0...30.0 ppm |
- |
2,0 ppm |
1ppm |
|
N2O |
0...1000ppm |
100 ppm |
100 ppm |
5ppm |
|
DCE |
0...1000 ppm |
200 ppm |
200 ppm |
10ppm |
|
NF3 |
0...50.0 ppm |
- |
10 ppm |
1ppm |
|
SF6 |
0...0.500 % |
1000 ppm |
1000 ppm |
0.010%vol |
|
CH3F |
0...0.500 % |
- |
- |
0.010%vol |
|
C4F6 |
0...50.0 ppm |
- |
- |
2ppm |
|
C5F8 |
0...20.0 ppm |
- |
- |
0.5ppm |
|
CH4 |
0 ... 100 %LEL |
- |
- |
5%LEL |
|