|
气体种类 |
量程 |
峰值报警 |
平均阀值报警 |
危险浓度报警 |
|
氢气 (H 2 ) |
0...1.000 % |
- |
- |
0.01%vol |
|
H2 |
0...4.00 % |
- |
- |
0.05%vol |
|
硫化氢(H 2 S) |
0...100ppm |
10ppm |
10ppm |
2ppm |
|
H2S |
0...30.0ppm |
10ppm |
10ppm |
0.5ppm |
|
氯气 (Cl 2 ) |
0...5.00ppm |
0.5ppm |
0.5ppm |
0.15ppm |
|
一氧化碳 (CO) |
0...500ppm |
30ppm |
25ppm |
10ppm |
|
氰化氢 (HCN) |
0...30.0ppm |
1.9ppm |
4.7ppm |
1ppm |
|
氯化氢 (HCl) |
0...30.0ppm |
2ppm |
5ppm |
1ppm |
|
HCl |
0...30.0ppm |
2ppm |
5ppm |
1ppm |
|
砷烷 (AsH 3 ) |
0...1.00ppm |
- |
0.05ppm |
0.03ppm |
|
AsH3 |
0...1.00ppm |
- |
0.05ppm |
0.03ppm |
|
AsH3 |
0...10.0ppm |
- |
0.05ppm |
0.5ppm |
|
PH3 |
0...1.00ppm |
0.10ppm |
0.30ppm |
0.05ppm |
|
磷烷 (PH 3 ) |
0...1.00ppm |
0.10ppm |
0.30ppm |
0.05ppm |
|
乙硼烷 (B 2 H 6 ) |
0...1.00ppm |
- |
0.10 ppm |
0.05ppm |
|
硅烷(SiH 4 ) |
0...50.0ppm |
- |
5ppm |
1.0ppm |
|
氟气 (F 2 ) |
0...5.00ppm |
0.10ppm |
0.10ppm |
0.03ppm |
|
氟化氢(HF) |
0...10,0ppm |
2ppm |
3ppm |
0.5ppm |
|
氨气(NH 3 ) |
0...50ppm |
20ppm |
25ppm |
1ppm |
|
NH3 |
0...1000ppm |
20ppm |
25ppm |
15ppm |
|
NH3 |
0...100ppm |
20ppm |
25ppm |
5ppm |
|
六甲基二硅(HMDS) |
0...0.500 % |
- |
- |
0.010%vol |
|
HMDS |
0...500ppm |
- |
- |
5ppm |
|
溴气 (Br 2 ) |
0...5.00ppm |
- |
0,1ppm |
0.05ppm |
|
溴化氢 (HBr) |
0...30.0ppm |
2ppm |
3ppm |
1ppm |
|
臭氧(O 3 ) |
0...1.00ppm |
0.10ppm |
0,10ppm |
0.05ppm |
|
二氧化氯(ClO 2 |
0...1.00ppm |
0.10ppm |
0,10ppm |
0.03ppm |
|
三氟化氯 (ClF 3 ) |
0...1.00ppm |
- |
0,10ppm |
0.03ppm |
|
正硅酸乙(TEOS) |
0...100ppm |
10ppm |
10ppm |
5ppm |
|
硼酸三甲酯(TMB) |
0...200ppm |
- |
- |
5ppm |
|
联氨 (N 2 H 4 ) |
0...1.00ppm |
0.10ppm |
0,01ppm |
0.02ppm |
|
磷酸三甲酯(TMP) |
0...30.0ppm |
- |
2,0ppm |
1ppm |
|
三氟化氮(NF3) |
0...50.0ppm |
- |
10ppm |
1ppm |
|
氟甲烷(CH 3 F) |
0...0.500 % |
- |
- |
0.010%vol |
|